Yoo, Seong-Jae Kwon, Hong-Beom Hong, Ui-Seon Kang, Dong-Hyun Lee, Sang-Myun Han, Jangseop Hwang, Jungho Kim, Yong-Jun 2024-01-19T19:02:27Z 2024-01-19T19:02:27Z 2021-09-05 2019-10-08 1867-1381 https://pubs.kist.re.kr/handle/201004/119460 We present a portable, inexpensive, and accurate microelectromechanical-system-based (MEMS-based) condensation particle counter (CPC) for sensitive and precise monitoring of airborne ultrafine particles (UFPs) at a point of interest. A MEMS-based CPC consists of two main parts: a MEMS-based condensation chip that grows UFPs to micro-sized droplets and a miniature optical particle counter (OPC) that counts single grown droplets with the light scattering method. A conventional conductive cooling-type CPC is miniaturized through MEMS technology and three-dimensional (3-D) printing techniques; the essential elements for growing droplets are integrated on a single glass slide. Our system is much more compact (75 mm x 130 mm x 50 mm), lightweight (205 g), and power-efficient (2.7 W) than commercial CPCs. In quantitative experiments, the results indicated that our system could detect UFPs with a diameter of 12.9 nm by growing them to micro-sized (3.1 mu m) droplets. Our system measured the UFP number concentration with high accuracy (mean difference within 4.1 %), and the number concentration range for which our system can count single particles is 7.99-6850 cm(-3). Thus, our system has the potential to be used for UFP monitoring in various environments (e.g., as an air filtration system, in high-precision industries utilizing clean rooms, and in indoor and outdoor atmospheres). English COPERNICUS GESELLSCHAFT MBH NANOPARTICLES FABRICATION STRESS SIZE CPC Microelectromechanical-system-based condensation particle counter for real-time monitoring of airborne ultrafine particles Article 10.5194/amt-12-5335-2019 1 ATMOSPHERIC MEASUREMENT TECHNIQUES, v.12, no.10, pp.5335 - 5345 ATMOSPHERIC MEASUREMENT TECHNIQUES 12 10 5335 5345 scie scopus 000489561500002 2-s2.0-85073624684 Meteorology & Atmospheric Sciences Meteorology & Atmospheric Sciences Article NANOPARTICLES FABRICATION STRESS SIZE CPC