Schnauber, Peter Singh, Anshuman Schall, Johannes Park, Suk In Song, Jin Dong Rodt, Sven Srinivasan, Kartik Reitzenstein, Stephan Davanco, Marcelo 2024-01-19T19:03:44Z 2024-01-19T19:03:44Z 2021-09-04 2019-10 1530-6984 https://pubs.kist.re.kr/handle/201004/119533 Silicon photonics enables scaling of quantum photonic systems by allowing the creation of extensive, low-loss, reconfigurable networks linking various functional on-chip elements. Inclusion of single quantum emitters onto photonic circuits, acting as on-demand sources of indistinguishable photons or single-photon nonlinearities, may enable large-scale chip-based quantum photonic circuits and networks. Toward this, we use low-temperature in situ electron-beam lithography to deterministically produce hybrid GaAs/Si3N4 photonic devices containing single InAs quantum dots precisely located inside nanophotonic structures, which act as efficient, Si3N4 waveguide-coupled on-chip, on-demand single-photon sources. The precise positioning afforded by our scalable fabrication method furthermore allows observation of postselected indistinguishable photons. This indicates a promising path toward significant scaling of chip-based quantum photonics, enabled by large fluxes of indistinguishable single-photons produced on-demand, directly on-chip. English AMER CHEMICAL SOC WAVE-GUIDE Indistinguishable Photons from Deterministically Integrated Single Quantum Dots in Heterogeneous GaAs/Si3N4 Quantum Photonic Circuits Article 10.1021/acs.nanolett.9b02758 1 NANO LETTERS, v.19, no.10, pp.7164 - 7172 NANO LETTERS 19 10 7164 7172 scie scopus 000490353500059 2-s2.0-85072880185 Chemistry, Multidisciplinary Chemistry, Physical Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter Chemistry Science & Technology - Other Topics Materials Science Physics Article WAVE-GUIDE Quantum dots hybrid devices deterministic sample fabrication indistinguishable photons quantum optics