최수호 오창석 Stephen Boandoh 양우철 김수민 김기강 2024-01-19T20:03:23Z 2024-01-19T20:03:23Z 2021-09-06 2019-05 1225-8822 https://pubs.kist.re.kr/handle/201004/120029 We introduce liquid ammonium sulfide as a reliable and carbon-free sulfur precursor for synthesizing large-area transition metal disulfides (TMdS) in chemical vapor deposition. The flux of sulfur during TMdS growth is precisely controlled by passing a known amount of carrier gas through a bubbling system containing liquid ammonium sulfide. However, controlling the flux of sulfur through the conventional evaporation of sulfur powder using a heating belt remains a challenge. By achieving controllability of sulfur flux, we study growth kinetics such as nucleation density and growth rate. Furthermore, the continuous supply of the sulfur precursor results in the growth of a large-area monolayer and a few layers of MoS2 film. In addition, we present the feasibility of ammonium sulfide as an effective and clean precursor for the growth of a wide range of TMdS, thus enabling it to serve as a universal sulfur precursor. English 한국진공학회 Synthesis of Transition Metal Disulfides with Liquid Ammonium Sulfide as a Reliable Sulfur Precursor Article 10.5757/ASCT.2019.28.3.60 2 한국진공학회지, v.28, no.3, pp.60 - 65 한국진공학회지 28 3 60 65 N kci ART002471433 Two-dimensional materials Transition metal dichalcogenides Chemical vapor deposition Precursor Ammonium sulfide