Jin, Mi-Jin Choe, Daeseong Lee, Seung Youb Park, Jungmin Jo, Junhyeon Oh, Inseon Kim, Shin-Ik Baek, Seung-Hyub Jeon, Cheolho Yoo, Jung-Woo 2024-01-19T20:34:56Z 2024-01-19T20:34:56Z 2021-09-02 2019-02-01 0169-4332 https://pubs.kist.re.kr/handle/201004/120375 SrTiO3 (STO) is a highly attractive oxide material due to its flexible tunability of electrical properties. It can be designed to exhibit a high mobility with a tunable carrier concentration by creating oxygen vacancies, or by doping with Nb or La, which substitute the Ti and Sr sites, respectively. Here we show a micro-patterned surface doping of STO by using reactive ion etching (RIE). The creation and pattering of a conductive STO surface were achieved by sequential treatments with Ar and O-2 plasma. The patterned conductive surface edge was well defined as confirmed by an electrostatic force microscopy. The electronic characteristics of the RIE treated STO surface were probed by a synchrotron radiation photoemission spectroscopy, which shows the emergence of Ti3+, Ti2+, Ti1+ states and metallic states near the Fermi level. The electrical mobility of the conductive STO surface can be increased up to 12000 cm/Vs with a typical sheet carrier concentration around 10(13)-10(14) cm(-2). Increasing Ar plasma time elongate the depth of the conductive surface, which reflects the change of magnetoresistance behavior at low temperature. The demonstrated control of the STO surface conductivity along with a large area and high precision patterning method can be widely used for a variety of oxide electronic and spintronic devices. English ELSEVIER SCIENCE BV DIELECTRIC-PROPERTIES ROOM-TEMPERATURE DOPED SRTIO3 MOBILITY GAS INTERFACES STRONTIUM SUPERCONDUCTIVITY COEXISTENCE TRANSITION Probing surface electronic properties of a patterned conductive STO by reactive ion etching Article 10.1016/j.apsusc.2018.10.068 1 APPLIED SURFACE SCIENCE, v.466, pp.730 - 736 APPLIED SURFACE SCIENCE 466 730 736 scie scopus 000452842500087 2-s2.0-85054820458 Chemistry, Physical Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Chemistry Materials Science Physics Article DIELECTRIC-PROPERTIES ROOM-TEMPERATURE DOPED SRTIO3 MOBILITY GAS INTERFACES STRONTIUM SUPERCONDUCTIVITY COEXISTENCE TRANSITION Oxide surface Strontium titanate Surface metallization Surface doping Plasma treatment