Ahn, Seung-Su Oh, Kyung-Sik Chung, Tai-Joo Park, Jong-Keuk 2024-01-19T21:02:44Z 2024-01-19T21:02:44Z 2022-01-25 2019-01 1229-7801 https://pubs.kist.re.kr/handle/201004/120498 Ti0.33Al0.67N/CrN nano-multilayers, which are known to have excellent wear resistance, were prepared using an unbalanced magnetron sputter to have various periods of 2-5 nm. Ti0.33Al0.67N had a hexagonal structure in a single layer, but converted to a cubic structure by forming a multilayer with CrN, which has a cubic structure. Thus, Ti0.33Al0.67N formed a superlattice in the multilayer. The Ti0.33Al0.67/CrN multilayer with a period of 2.5 nm greatly exceeded the hardness of the Ti0.33Al0.67N and the CrN single layer, reaching 39 GPa. According to the low angle X-ray diffraction results, the Ti0.33Al0.67N/CrN multilayer maintained its as-coated structure to a temperature as high as 700 degrees C and exhibited hardness of 30 GPa. The thickness of the oxide layer of the Ti0.33Al0.67N/CrN multilayered coating was less than one-tenth of those of the single layers. Thus, Ti0.33Al0.67N/CrN multilayered coating had hardness and oxidation resistance far superior to those of its constituent single layers. English 한국세라믹학회 Hardness and Oxidation Resistance of Ti0.33Al0.67N/CrN Nano-multilayered Superlattice Coatings Article 10.4191/kcers.2019.56.1.08 1 Journal of The Korean Ceramic Society, v.56, no.1, pp.49 - 55 Journal of The Korean Ceramic Society 56 1 49 55 N scopus kci ART002434663 000457254500004 2-s2.0-85062838766 Materials Science, Ceramics Materials Science Article DEPOSITION NITRIDE TIN AL Ti0.33Al0.67N CrN Multilayer Hardness Oxidation resistance