Hieu Trung Tran Byun, Ji Young Kim, Sang Hoon 2024-01-19T21:33:09Z 2024-01-19T21:33:09Z 2021-09-05 2018-10-05 0925-8388 https://pubs.kist.re.kr/handle/201004/120802 Nanoporous Pt and Au thin films were prepared by dry etching methods and compared to those prepared by conventional wet etching (dealloying). While reactive ion etching (RIE) and deep RIE methods did not yield nanoporous structures with high roughness factors (<5), gentle XeF2 dry etching yielded thin metallic nanoporous films (similar to 200 nm) with high enough roughness factors (similar to 40). The nanoporous films were as good as those prepared by wet etching using 3% HF solution in terms of thickness and roughness factors. Sensing performance of nanoporous Pt films prepared by XeF2 dry etching was as good as that of wet-chemically dealloyed nanoporous Pt films for glucose sensing. (C) 2018 Elsevier B.V. All rights reserved. English ELSEVIER SCIENCE SA NONENZYMATIC GLUCOSE DETECTION SURFACE-AREA GOLD SILICON FABRICATION PLATINUM EVOLUTION SENSORS Nanoporous metallic thin films prepared by dry processes Article 10.1016/j.jallcom.2018.06.004 1 JOURNAL OF ALLOYS AND COMPOUNDS, v.764, pp.371 - 378 JOURNAL OF ALLOYS AND COMPOUNDS 764 371 378 scie scopus 000444058300045 2-s2.0-85048434264 Chemistry, Physical Materials Science, Multidisciplinary Metallurgy & Metallurgical Engineering Chemistry Materials Science Metallurgy & Metallurgical Engineering Article NONENZYMATIC GLUCOSE DETECTION SURFACE-AREA GOLD SILICON FABRICATION PLATINUM EVOLUTION SENSORS Dry etching Nanoporous metallic thin films Sensor XeF2