Tayebi, Behnam Sharif, Farnaz Karimi, Ali Han, Jae-Ho 2024-01-19T21:33:34Z 2024-01-19T21:33:34Z 2022-01-10 2018-10 0278-0046 https://pubs.kist.re.kr/handle/201004/120825 Testing process in industrial profiling depends on the characterization of three-dimensional (3-D) objects with high sensitivity in spatial and temporal domains. Ordinary 3-D measurement instruments scan the image area in the temporal domain; therefore, these techniques experience low temporal stability especially for industrial and biomedical sensing. We propose a novel scan-free extended image instrument for sensing the area of 3-D microscopic objects using an interferometric technique with fixed optical parameters, such as resolution, and without mechanical movement. The technique could accelerate the control process in industrial fault detection and images of biological samples could be obtained in a shorter time. First, a stable system for doubling the image area is introduced. Second, the principles underlying the two-dimensional sampling scheme are introduced to record the maximum image area using a dual multiplexing technique at subsampling frequency. Moreover, a standard factor is presented as a figure of merit to determine the exact image area enhancement. Finally, the feasibility of this technique was demonstrated by sensing reflective and transparent objects with image area of up to 4.3-times that of a single-hologram recording using the square scheme. Furthermore, scan-free monitoring of the photolithography process was demonstrated in real-time. The standard deviation of thickness is 0.48 nm, which demonstrates the subnanometer temporal sensitivity of this technique. English IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC DIFFRACTION PHASE MICROSCOPY OFF-AXIS HOLOGRAPHY ILLUMINATION INTERFEROMETER DIGITAL HOLOGRAPHY REAL-TIME FIELD RECONSTRUCTION DYNAMICS ACTUATOR OBJECTS Stable Extended Imaging Area Sensing Without Mechanical Movement Based on Spatial Frequency Multiplexing Article 10.1109/TIE.2018.2803721 1 IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, v.65, no.10, pp.8195 - 8203 IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS 65 10 8195 8203 scie scopus 000441990000004 2-s2.0-85041491881 Automation & Control Systems Engineering, Electrical & Electronic Instruments & Instrumentation Automation & Control Systems Engineering Instruments & Instrumentation Article DIFFRACTION PHASE MICROSCOPY OFF-AXIS HOLOGRAPHY ILLUMINATION INTERFEROMETER DIGITAL HOLOGRAPHY REAL-TIME FIELD RECONSTRUCTION DYNAMICS ACTUATOR OBJECTS Image sampling interferometers measurement phase detection shape control