Lee, Byung Chul Nikoozadeh, Amin Park, Kwan Kyu Khuri-Yakub, Butrus T. 2024-01-19T22:03:27Z 2024-01-19T22:03:27Z 2021-09-03 2018-08 1424-8220 https://pubs.kist.re.kr/handle/201004/121071 Capacitive micromachined ultrasonic transducers (CMUTs) with substrate-embedded springs offer highly efficient output pressure performance over conventional CMUTs, owing to their nonflexural parallel plate movement. The embedded silicon springs support thick Si piston plates, creating a large nonflexural average volume displacement efficiency in the operating frequency range from 1-3 MHz. Static and dynamic volume displacements of the nonflexural parallel plates were examined using white light interferometry and laser Doppler vibrometry. In addition, an output pressure measurement in immersion was performed using a hydrophone. The device showed a maximum transmission efficiency of 21 kPa/V, and an average volume displacement efficiency of 1.1 nm/V at 1.85 MHz with a low DC bias voltage of 55 V. The device element outperformed the lead zirconate titanate (PZT) ceramic HD3203, in the maximum transmission efficiency or the average volume displacement efficiency by 1.35 times. Furthermore, its average volume displacement efficiency reached almost 80% of the ideal state-of-the-art single-crystal relaxor ferroelectric materials PMN-0.33PT. Additionally, we confirmed that high-efficiency output pressure could be generated from the CMUT device, by quantitatively comparing the hydrophone measurement of a commercial PZT transducer. English Multidisciplinary Digital Publishing Institute (MDPI) High-Efficiency Output Pressure Performance Using Capacitive Micromachined Ultrasonic Transducers with Substrate-Embedded Springs Article 10.3390/s18082520 1 Sensors, v.18, no.8 Sensors 18 8 Y scie scopus 000445712400120 2-s2.0-85052142625 Chemistry, Analytical Engineering, Electrical & Electronic Instruments & Instrumentation Chemistry Engineering Instruments & Instrumentation Article CMUT MEMBRANES SYSTEM PROBE PZT capacitive micromachined ultrasonic transducers (CMUTs) substrate-embedded springs nonflexural piston movement high-efficiency output pressure