Kong, Cuicui Guo, Peng Sun, Lili Zhou, Yong Liang, Yunxiao Li, Xiaowei Ke, Peiling Lee, Kwang-Ryeol Wang, Aiying 2024-01-19T22:34:13Z 2024-01-19T22:34:13Z 2021-09-03 2018-05-25 0257-8972 https://pubs.kist.re.kr/handle/201004/121361 Co-doping two metals into diamond-like carbon (DLC) films exhibits a desirable combination of low residual stress and hard hardness for further application, but the insight into tribological mechanism induced by the co-doped metals is still not fully clarified yet. In this work, we fabricated the Ti/Al co-doped DLC films (Ti/Al-DLC) with various metal concentrations using the hybrid ion beam system, and the tribological properties of films were systematically investigated. Results revealed that the co-doped Ti/Al metals played an important role in the tribological behaviors of DLC films; the film deposited at 2.5 A (Ti10.06at.%Al4.78at.%) exhibited the lowest friction coefficient of about 0.05 and wear rate of 1.56 x 10(-16) m(3) N-1 m(-1). This attributed to the formation of thick transfer layer in the friction interface, which could be described as a dual or hierarchy nanostructure constructed of cross-linking amorphous carbon networks and hard phase (mainly TiC and Al2O3) structures. English ELSEVIER SCIENCE SA NANOCOMPOSITE TIALC COATINGS AMORPHOUS-CARBON DLC COATINGS ION-BEAM TRIBOFILM FORMATION BIAS VOLTAGE THIN-FILMS AB-INITIO MICROSTRUCTURE DEPOSITION Tribological mechanism of diamond-like carbon films induced by Ti/Al co-doping Article 10.1016/j.surfcoat.2018.02.098 1 SURFACE & COATINGS TECHNOLOGY, v.342, pp.167 - 177 SURFACE & COATINGS TECHNOLOGY 342 167 177 scie scopus 000440120700020 2-s2.0-85042867909 Materials Science, Coatings & Films Physics, Applied Materials Science Physics Article NANOCOMPOSITE TIALC COATINGS AMORPHOUS-CARBON DLC COATINGS ION-BEAM TRIBOFILM FORMATION BIAS VOLTAGE THIN-FILMS AB-INITIO MICROSTRUCTURE DEPOSITION Diamond-like carbon Ti/Al co-doped Tribological behaviors Transfer layer