Kwak, Seungmin Shim, Young-Seok Yoo, Yong Kyoung Lee, jin hyung Kim, Inho Kim, Jinseok Lee, Kyu Hyoung Lee, Jeong Hoon 2024-01-19T22:34:49Z 2024-01-19T22:34:49Z 2022-01-25 2018-05 1738-8090 https://pubs.kist.re.kr/handle/201004/121394 We report a micromachined H-2 sensor that is composed of a Pt micro-heater, low-stress insulating layer (SiO2/SiNx/SiO2), Pt-interdigitated electrodes, and gas sensing materials. Three types of Pt micro-heater are designed as function of electrode width, and their thermal properties are systematically analyzed by finite element modeling FEM with infrared camera. The power consumptions when the surface temperature reached 150, 200, 250, and 300 degrees C are calculated to approximately 33, 48, 67 and 85 mW, respectively. The response of the PdO nanoparticles-decorated TiO2 thin films to H-2 is much higher than those of other gases such as CH4 and CO at 200 degrees C (48 mW). Further, the response time is reduced to approximately 3 s. The enhancement of gas sensing properties is related to well-designed micro-heater and catalytic effects of PdO nanoparticles such as electronic and chemical sensitization. These results suggest that the PdO nanoparticles-decorated TiO2 thin film, namely MEMS-based H-2 sensors are very promising for use in IoT application to improve the quality of human's life. [GRAPHICS] . English KOREAN INST METALS MATERIALS MEMS-Based Gas Sensor Using PdO-Decorated TiO2 Thin Film for Highly Sensitive and Selective H-2 Detection with Low Power Consumption Article 10.1007/s13391-018-0030-5 1 ELECTRONIC MATERIALS LETTERS, v.14, no.3, pp.305 - 313 ELECTRONIC MATERIALS LETTERS 14 3 305 313 N scie scopus kci 000431125500005 2-s2.0-85046100837 Materials Science, Multidisciplinary Materials Science Article ELECTRICAL-PROPERTIES SENSING PROPERTIES HYDROGEN SENSORS INTERNET MICROHEATER MEMS Gas sensor Hydrogen Thin film PdO Micro-heater