Schnauber, Peter Schall, Johannes Bounouar, Samir Hoehne, Theresa Park, Suk-In Ryu, Geun-Hwan Heindel, Tobias Burger, Sven Song, Jin-Dong Rodt, Sven Reitzenstein, Stephan 2024-01-19T23:03:03Z 2024-01-19T23:03:03Z 2021-09-03 2018-04 1530-6984 https://pubs.kist.re.kr/handle/201004/121548 The development of multinode quantum optical circuits has attracted great attention in recent years. In particular, interfacing quantum-light sources, gates, and detectors on a single chip is highly desirable for the realization of large networks. In this context, fabrication techniques that enable the deterministic integration of preselected quantum-light emitters into nanophotonic elements play a key role when moving forward to circuits containing multiple emitters. Here, we present the deterministic integration of an InAs quantum dot into a 50/50 multimode interference beamsplitter via in situ electron beam lithography. We demonstrate the combined emitter-gate interface functionality by measuring triggered single-photon emission on-chip with g((2))(0) = 0.13 +/- 0.02. Due to its high patterning resolution as well as spectral and spatial control, in situ electron beam lithography allows for integration of preselected quantum emitters into complex photonic systems. Being a scalable single-step approach, it paves the way toward multinode, fully integrated quantum photonic chips. English AMER CHEMICAL SOC SINGLE PHOTONS WAVE-GUIDE CIRCUITS GENERATION Deterministic Integration of Quantum Dots into on-Chip Multimode Interference Beamsplitters Using in Situ Electron Beam Lithography Article 10.1021/acs.nanolett.7b05218 1 NANO LETTERS, v.18, no.4, pp.2336 - 2342 NANO LETTERS 18 4 2336 2342 scie scopus 000430155900021 2-s2.0-85045199858 Chemistry, Multidisciplinary Chemistry, Physical Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter Chemistry Science & Technology - Other Topics Materials Science Physics Article SINGLE PHOTONS WAVE-GUIDE CIRCUITS GENERATION In situ electron beam lithography quantum dot on-chip quantum optics multimode interference beamsplitter deterministic device manufacturing