Kang, JoonHyun Kim, Young-Hwan Kwon, Seok Joon Park, Joon-Suh Park, Kyoung Wan Park, Jae-Gwan Han, Il Ki 2024-01-20T00:01:56Z 2024-01-20T00:01:56Z 2021-09-03 2017-12 0021-4922 https://pubs.kist.re.kr/handle/201004/121990 Surface smoothing of indium tin oxide (ITO) film by laser irradiation was demonstrated. The ITO surface was etched by choline radicals, which were activated by laser irradiation at a wavelength of 532nm. The RMS surface roughness was improved from 5.6 to 4.6 nm after 10 min of laser irradiation. We also showed the changes in the surface morphology of the ITO film with various irradiation powers and times. (C) 2017 The Japan Society of Applied Physics English IOP PUBLISHING LTD LIGHT-EMITTING DEVICES THIN-FILMS Surface smoothing of indium tin oxide film by laser-induced photochemical etching Article 10.7567/JJAP.56.128003 1 JAPANESE JOURNAL OF APPLIED PHYSICS, v.56, no.12 JAPANESE JOURNAL OF APPLIED PHYSICS 56 12 scie scopus 000414676000003 2-s2.0-85039148677 Physics, Applied Physics Article LIGHT-EMITTING DEVICES THIN-FILMS surface smoothing dressed photon laser-induced photochemical etching Indium tin oxide