Song, Hyun-Cheol Kumar, Prashant Maurya, Deepam Kang, Min-Gyu Reynolds, William T., Jr. Jeong, Dae-Yong Kang, Chong-Yun Priya, Shashank 2024-01-20T00:02:03Z 2024-01-20T00:02:03Z 2021-09-03 2017-12 1057-7157 https://pubs.kist.re.kr/handle/201004/121996 We demonstrate a microscale vibration energy harvester exhibiting an ultra-low resonance frequency and high power density. A spiral shaped microelectromechanical system (MEMS) energy harvester was designed to harvest ambient vibrations at a low frequency (<200 Hz) and acceleration (<0.25 g). High quality Pb(Zr0.48Ti0.52)O-3 (PZT) film with 1.8 mu m-thickness exhibiting remanent polarization of 36.2 mu C/cm(2) and longitudinal piezoelectric constant of 155 pm/V was synthesized to achieve high efficiency mechanical to electrical conversion. The experimental results demonstrate an ultra-low natural frequency of 48 Hz for MEMS harvester. This is one of the lowest resonance frequency reported for the piezoelectric MEMS energy harvester. Further, the position of the natural frequency was controlled by modulating the number of spiral turns and weight of the proof mass. The vibration mode shape and stress distribution were validated through a finite element analysis. The maximum output power of 23.3 nW was obtained from the five turns spiral MEMS energy harvester excited at 0.25 g acceleration and 68Hz. The normalized area and the volumetric energy density were measured to be 5.04 x 10(-4) mu W/mm(2) . g(2) . Hz and 4.92 x 10(-2) mu W/mm(3) . g(2) . Hz, respectively. [2017-0018] English IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC LOW-LEVEL GENERATOR SENSOR FABRICATION COEFFICIENTS FILMS Ultra-Low Resonant Piezoelectric MEMS Energy Harvester With High Power Density Article 10.1109/JMEMS.2017.2728821 1 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.26, no.6, pp.1226 - 1234 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 26 6 1226 1234 scie scopus 000417784500008 2-s2.0-85052846654 Engineering, Electrical & Electronic Nanoscience & Nanotechnology Instruments & Instrumentation Physics, Applied Engineering Science & Technology - Other Topics Instruments & Instrumentation Physics Article LOW-LEVEL GENERATOR SENSOR FABRICATION COEFFICIENTS FILMS Energy harvesting low resonance frequency piezoelectric film spiral structure