Yoon, Sang-Moo Choi, Ji-Won Jang, Gun-Eik 2024-01-20T00:31:00Z 2024-01-20T00:31:00Z 2022-01-25 2017-10 1533-4880 https://pubs.kist.re.kr/handle/201004/122190 2.59 wt.% manganese doped tin oxide (MTO)/silver (Ag)/MTO multilayer films were prepared by use of DC/RF magnetron sputtering technique on flexible substrate. The electrical, optical, and structure properties of multilayer films were investigated with varying the thickness of the MTO layer. The optimum thickness of Ag to form a continuous conducting layer was found to be 10 nm. The highest transmittance of multilayer film was about 86.1% at 550 nm wavelength in MTO (40 nm)/Ag (10 nm)/MTO (40 nm). The sheet resistance of multilayer films was almost constant due to the Ag layer, while the resistivity increased simultaneously with increasing thickness of the MTO layer from 20 to 60 nm. The calculated Figure of merit (Phi(TC)) value of multilayer film was 36.6 x 10(-3) Omega(-1). The surface roughness of the optimized films was as low as 0.8 nm. English AMER SCIENTIFIC PUBLISHERS Highly Transparent MTO/Ag/MTO Multilayer Film Deposited on Polyethylene Terephthalate Substrate for Transparent Conductive Oxide Article 10.1166/jnn.2017.14753 1 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.17, no.10, pp.7218 - 7222 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 17 10 7218 7222 N scie scopus 000410615300028 2-s2.0-85025830851 Chemistry, Multidisciplinary Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter Chemistry Science & Technology - Other Topics Materials Science Physics Article ROOM-TEMPERATURE SOLAR-CELLS ELECTRODES SNO2 LAYER TCO Mn Doped T in Oxide OMO Structure Eigure of Merit