Lee, Jin-Hyung Cho, Il-Joo Ko, Kyungmin Yoon, Eui-Sung Park, Hyung-Ho Kim, Tae Song 2024-01-20T01:03:30Z 2024-01-20T01:03:30Z 2021-09-05 2017-07 0946-7076 https://pubs.kist.re.kr/handle/201004/122570 We propose a new flexible piezoelectric micromachined ultrasonic transducer (pMUT) array integrated on flexible polydimethylsiloxane (PDMS) that can be used in studying brain stimulation by ultrasound. To achieve the technical demands of a high sound pressure level and flexibility, a diaphragm-type piezoelectric ultrasound transducer array was manufactured with 55 mu m-thick bulk lead zirconate titanate (PZT) that was thinned after bonding with a silicon wafer. The ultrasound transducer array was then strongly bonded onto a PDMS substrate using an oxygen-plasma treatment followed by precise dicing with a fixed pitch to achieve flexibility. The radius of curvature was smaller than 5 mm, which is sufficient for attachment to the surface of a mouse brain. After a thinning process for the PZT layer, we observed that the PZT layer still maintained a high ferroelectric property. The measured remnant polarization (P-r) and coercive field (E-c) were 28.26 mu C/cm(2) and 79 kV/cm, respectively. The resonant frequencies of fabricated pMUT elements with different membrane sizes of 700, 800, 900, 1200 mu m in diameter were measured to be 694.4, 565.4, 430.8, and 289.3 kHz, respectively. By measuring the ultrasound output pressure, a pMUT showed a sound intensity (I-sppa) of 44 mW/cm(2) at 80 V, which is high enough for low-intensity ultrasound brain stimulation. English SPRINGER HEIDELBERG Flexible piezoelectric micromachined ultrasonic transducer (pMUT) for application in brain stimulation Article 10.1007/s00542-016-2912-5 1 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, v.23, no.7, pp.2321 - 2328 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 23 7 2321 2328 scie scopus 000404149800001 2-s2.0-84964579505 Engineering, Electrical & Electronic Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Engineering Science & Technology - Other Topics Materials Science Physics Article