Choi, Junhee Jeong, Doo Seok Lee, Wook Seong Lee, Taek-Sung Lee, Kyeong-Seok Kim, Won Mok Kim, Donghwan Kim, Inho 2024-01-20T03:04:29Z 2024-01-20T03:04:29Z 2021-09-05 2016-10 1533-4880 https://pubs.kist.re.kr/handle/201004/123602 We introduce and demonstrate a cost-effective method for the fabrication of random short Si nanopillars using metal-assisted chemical etching for effective light trapping in crystalline Si wafers. Random crystalline Si nanopillars were fabricated by metal-assisted etching of the crystalline Si wafers using Au nanohole thin films as a metal catalyst. The Au nanohole thin films were prepared by thermal evaporation of Au onto crystalline Si wafers with indium nanoparticles serving as shadow masks. Indium nanoparticles were synthesized by thermal evaporation and spontaneous dewetting at room temperature. The Si nanopillars height could be adjusted by varying the etching time. The improved broadband antireflectance provided by the fabricated crystalline Si nanopillars was confirmed by measurements of the total light absorption of the Si wafers. English AMER SCIENTIFIC PUBLISHERS SILICON SOLAR-CELL OPTICAL-ABSORPTION PHOTOVOLTAICS NANOSTRUCTURES EFFICIENCY DESIGN ARRAYS Random Si Nanopillar Fabrication by Spontaneous Dewetting of Indium for Broadband Antireflection Article 10.1166/jnn.2016.13211 1 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.16, no.10, pp.10644 - 10648 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 16 10 10644 10648 scie scopus 000387100600090 2-s2.0-84991075554 Chemistry, Multidisciplinary Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter Chemistry Science & Technology - Other Topics Materials Science Physics Article SILICON SOLAR-CELL OPTICAL-ABSORPTION PHOTOVOLTAICS NANOSTRUCTURES EFFICIENCY DESIGN ARRAYS Si Nanopillar Broadband Antireflection Mie Scattering Solar Cells