Lee, Tae-Ho Kim, Dae-Hyeon Kim, Bo-Yun Choi, Hye-Yoon Oh, Joon-Hak Kang, Chong-Yun Nahm, Sahn 2024-01-20T04:02:12Z 2024-01-20T04:02:12Z 2021-09-05 2016-06-15 1359-6454 https://pubs.kist.re.kr/handle/201004/123962 A homogeneous KNbO3 (MN) thin film was grown on a Pt/Ti/SiO2/Si substrate using the RF sputtering method. A K2.88Nb5O15 secondary phase was formed in the KN film when the deposition and the annealing temperatures were greater than room temperature (RT) and 800 degrees C, respectively, owing to the evaporation of K2O. On the other hand, KNb3O8 and K3Nb5.45O15 secondary phases were formed in the KN films when the annealing temperature was less than 800 C or the annealing time at 800 degrees C was shorter than 90 min. A homogeneous KN thin film was formed when it was deposited at RT and subsequently annealed at 800 degrees C for 90 min under the K2O atmosphere. This KN film exhibits a relative permittivity of 884 with a dissipation factor of 6.71% at 100 kHz. The leakage current density of 1.06 x 10(-6) A/cm(2) at 0.1 MV/cm and a breakdown field of 1.5 MV/cm were observed from this film. This film showed a saturation polarization of 21.9 mu C/cm(2), with a remnant polarization of 8.3 mu C/cm(2), and a piezoelectric strain constant of 125 pm/V. (C) 2016 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved. English PERGAMON-ELSEVIER SCIENCE LTD ENHANCED PIEZOELECTRIC PROPERTIES PULSED-LASER DEPOSITION LEAD-FREE PIEZOCERAMICS BARIUM-TITANATE 2ND-HARMONIC GENERATION DOMAIN-STRUCTURES SINGLE-CRYSTALS CERAMICS TEMPERATURE CARBONATES Structural and electrical properties of KNbO3 thin film grown on a Pt/Ti/SiO2/Si substrate using the RF magnetron sputtering method Article 10.1016/j.actamat.2016.04.024 1 ACTA MATERIALIA, v.112, pp.53 - 58 ACTA MATERIALIA 112 53 58 scie scopus 000377326400005 2-s2.0-84963614708 Materials Science, Multidisciplinary Metallurgy & Metallurgical Engineering Materials Science Metallurgy & Metallurgical Engineering Article ENHANCED PIEZOELECTRIC PROPERTIES PULSED-LASER DEPOSITION LEAD-FREE PIEZOCERAMICS BARIUM-TITANATE 2ND-HARMONIC GENERATION DOMAIN-STRUCTURES SINGLE-CRYSTALS CERAMICS TEMPERATURE CARBONATES Lead-free KN thin film Piezoelectricity Sputtering