Lee, In Joon Lee, Min Soo Kim, Min Su Jun, Dong-Hwan Jeong, Hae Yong Kim, Sangin Han, Sang-wook Moon, Sung 2024-01-20T04:30:54Z 2024-01-20T04:30:54Z 2021-09-04 2016-05 1533-4880 https://pubs.kist.re.kr/handle/201004/124134 In this paper, we describe a design, simulation, and fabrication of an InGaAs/InP single photon avalanche photodiode (SPAD), which requires a much higher gain, compared to APD's for conventional optical communications. To achieve a higher gain, an efficient multiplication width control is essential because it significantly affects the overall performance including not only gain but also noise characteristics. Normally, the multiplication layer width is controlled by the Zinc diffusion process. For the reliable and controllable diffusion process, we used metal organic chemical vapor deposition (MOCVD). The controllability of the proposed diffusion process is proved by the diffusion depth measurement of the fabricated devices which show the proportional dependence on the square root of the diffusion time. As a result, we successfully implemented the SPAD that exhibits a high gain enough to detect single photons and a very low dark current level of about 0.1 nA with 0.95 breakdown voltage. The single photon detection efficiency of 15% was measured at the 100 kHz gate pulse rate and the temperature of 230 K. English AMER SCIENTIFIC PUBLISHERS QUANTUM KEY DISTRIBUTION HIGH-SPEED MULTIPLICATION LAYERS SUPPRESSION InGaAs/InP Avalanche Photodiode for Single Photon Detection with Zinc Diffusion Process Using Metal Organic Chemical Vapor Deposition Article 10.1166/jnn.2016.12245 1 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.16, no.5, pp.5155 - 5158 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 16 5 5155 5158 scie scopus 000386123100147 2-s2.0-84971642785 Chemistry, Multidisciplinary Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter Chemistry Science & Technology - Other Topics Materials Science Physics Article QUANTUM KEY DISTRIBUTION HIGH-SPEED MULTIPLICATION LAYERS SUPPRESSION Avalanche Photodiode Single Photon Detector Quantum