Lee, Albert S. Choi, Seung-Sock Oh, Sung Yeoun Lee, He Seung Kim, Bomin Hwang, Seung Sang Baek, Kyung-Youl 2024-01-20T05:34:44Z 2024-01-20T05:34:44Z 2021-09-05 2015-11 2050-7526 https://pubs.kist.re.kr/handle/201004/124821 Poly(methyl) silsesquioxane-based spin-on-glass resins incorporating both a cyclic precursor, 1,3,5,7-tetramethyl 1,3,5,7-tetrahydroxyl cyclosiloxane, and incompletely condensed methyl-substituted POSS were synthesized and their thermal, mechanical, and electrical properties were investigated as a function of the POSS loading content. By introducing incompletely condensed methyl-substituted POSS compounds at the molecular level as sol-gel precursors, exceptional thermal stability (4700 degrees C), good mechanical properties (elastic modulus >4.0 GPa), and an ultra-low dielectric constant (k = 1.8) were obtained. In addition to providing a new route towards fully poly(methyl) silsesquioxane-based spin-on-glass resins with the above properties, the realization of the application of integration circuits was evaluated to show that the ultra low-k, mechanically robust spin-on-glass materials were able to withstand harsh wet chemical and dry etching, as well as chemical mechanical planarization (CMP) processing. English ROYAL SOC CHEMISTRY POLYHEDRAL OLIGOSILSESQUIOXANES POLYSILSESQUIOXANES SILSESQUIOXANES Incompletely condensed POSS-based spin-on-glass networks for impeccable ultra low-k integration Article 10.1039/c5tc02683k 1 JOURNAL OF MATERIALS CHEMISTRY C, v.3, no.44, pp.11605 - 11611 JOURNAL OF MATERIALS CHEMISTRY C 3 44 11605 11611 scie scopus 000364826000006 2-s2.0-84946567876 Materials Science, Multidisciplinary Physics, Applied Materials Science Physics Article POLYHEDRAL OLIGOSILSESQUIOXANES POLYSILSESQUIOXANES SILSESQUIOXANES