Lee, JinJu Ha, Jong-Yoon Yim, Haena Choi, Won-Kook Cho, Ji-Won 2024-01-20T05:34:48Z 2024-01-20T05:34:48Z 2021-09-05 2015-11 1533-4880 https://pubs.kist.re.kr/handle/201004/124825 The large-area Al-doped ZnO thin films are successfully deposited at room temperature on polycarbonate substrate using a 1500 mm dual cylindrical cathodes sputtering system. Those thin films have smooth surfaces (RMS: 9.6 nm) and lower thicknesses deviation (Uniformity: 98.6%) despite of high RF power. The optical transmittance properties of 3.13 wt% Al doped ZnO thin films have above 85% in visible region. A dual cylindrical cathodes sputtering system can fabricate transparent electrode on flexible electronic devices at room temperature for mass production of 6th generation solar cell and display industry. English AMER SCIENTIFIC PUBLISHERS TRANSPARENT CONDUCTING ZNO ELECTRICAL-PROPERTIES LAYER OXIDE TEMPERATURE GROWTH Crystal Structure and Optical Properties of Al-Doped ZnO Large-Area Thin Films Using 1500 mm Dual Cylindrical Cathodes Article 10.1166/jnn.2015.11454 1 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.15, no.11, pp.8370 - 8374 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 15 11 8370 8374 scie scopus 000365554700003 2-s2.0-84944931269 Chemistry, Multidisciplinary Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter Chemistry Science & Technology - Other Topics Materials Science Physics Article TRANSPARENT CONDUCTING ZNO ELECTRICAL-PROPERTIES LAYER OXIDE TEMPERATURE GROWTH Mesoporous Tin Oxide Hazardous Gas Sensor Impregnated Palladium Transparent Conducting Oxide Al-Doped ZnO Cylindrical Type Magnetron Cathode Source