Kwon, Taeyun Shin, Kyeong-Sik Hyung, Minsurk Eom, Kilho Kim, Tae Song 2024-01-20T06:32:19Z 2024-01-20T06:32:19Z 2021-09-05 2015-08 1738-494X https://pubs.kist.re.kr/handle/201004/125177 We fabricated a piezoelectric thick film, whose electromechanical properties are optimized, for development of micromechanical cantilever as a sensor and actuator. Specifically, we studied the electromechanical properties of piezoelectric thick films made of different kinds of piezoelectric powders with their different sizes. The electromechanical properties of piezoelectric thick film are optimized when it is made of both micro- and nano-sized piezoelectric particles. Moreover, we fabricated a micromechanical cantilever using piezoelectric thick film, and investigated the vibrational characteristics of piezoelectric thick film-based microcantilevers. It is shown that a cantilever made of optimized piezoelectric thick film exhibits the excellent vibrational properties such as high Q-factor even in a viscous fluid, and that the resonance behavior of such a cantilever is very stable when compared with cantilevers made of other piezoelectric thick films. Our study provides the design rule of piezoelectric thick film for further development of micromechanical devices based on such a piezoelectric film. English KOREAN SOC MECHANICAL ENGINEERS PZT SILICON DENSIFICATION SENSORS Fabrication of piezoelectric thick films for development of micromechanical cantilevers Article 10.1007/s12206-015-0732-7 1 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, v.29, no.8, pp.3351 - 3356 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY 29 8 3351 3356 scie scopus kci ART002016541 000359405600031 2-s2.0-84938682550 Engineering, Mechanical Engineering Article PZT SILICON DENSIFICATION SENSORS Piezoelectric film Electromechanical properties Microcantilever Vibration