Lee, Albert S. Oh, Sung Yeoun Choi, Seung-Sock Lee, He Seung Hwang, Seung Sang Baek, Kyung-Youl 2024-01-20T06:33:57Z 2024-01-20T06:33:57Z 2021-09-05 2015-07 2046-2069 https://pubs.kist.re.kr/handle/201004/125263 A series of organic-inorganic hybrid spin-on-glass polymethylsilsesquioxanes were synthesized utilizing a cyclic siloxane precursor, 1,3,5,7-tetramethyl-1,3,5,7-tetrahydroxyl cyclosiloxane (MT4-OH), copolymerized with methyltriethoxysilane (MTES) at various comonomer ratios. By selectively introducing this 2-D cyclic crosslinker, we were able to obtain spin-on-glass hybrimers with low dielectric constant (2.5-2.7), high nanoindentation modulus (5-10.5 GPa), with high thermal stability (> 700 degrees C) without the use of porogens or additives. The use of the cyclic monomer MT4-OH greatly increased the mechanical properties, which allowed for impeccable reliability of a variety of patterns obtained through etching and chemical mechanical planarization processes, while maintaining optimal gap-filling properties. Due to the superior dielectric, mechanical, and integrated processing of these materials, these hybrids derived from MT4-OH may be utilized as next generation spin-on-glass low-dielectric constant materials. English ROYAL SOC CHEMISTRY Robust spin-on-glass poly(methyl)silsesquioxane-based low-k materials derived from a cyclic siloxane precursor Article 10.1039/c5ra11110b 1 RSC ADVANCES, v.5, no.82, pp.66511 - 66517 RSC ADVANCES 5 82 66511 66517 scie scopus 000359251600002 2-s2.0-84938946801 Chemistry, Multidisciplinary Chemistry Article