Kim, Hee-Soo Choi, Kwang S. Kim, Eun J. Kang, Kihun Kim, Ju H. Kim, Joosun Yoon, Chong S. 2024-01-20T06:34:25Z 2024-01-20T06:34:25Z 2021-09-05 2015-07 0013-4651 https://pubs.kist.re.kr/handle/201004/125289 320-nm-thick LiZr2(PO4)(3) thin film was prepared by radio frequency sputtering and thermally annealed up to 1000 degrees C to fully crystallize the as-deposited film. The room-temperature ionic conductivity of the film annealed at 800 degrees C was 1.3 x 10(-7) S/cm which was inferior compared to its bulk counterpart due to the partial crystallization and small grain size; however, at an elevated temperature, the ionic conductivity approached the bulk value, reaching 4.0 x 10(-6) S/cm above 100 degrees C. It was demonstrated that combined with chemical stability of LiZr2(PO4)(3) and low electronic conductivity, the LiZr2(PO4)(3) thin film can be a possible candidate material for a solid electrolyte operating at an elevated temperature. (C) 2015 The Electrochemical Society. All rights reserved. English ELECTROCHEMICAL SOC INC LITHIUM LANTHANUM TITANATE IONIC-CONDUCTIVITY BATTERIES STATE MICROBATTERIES MOBILITY NASICON Characterization of Sputter-Deposited LiZr2(PO4)(3) Thin Film Solid Electrolyte Article 10.1149/2.0501510jes 1 JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.162, no.10, pp.A2080 - A2084 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 162 10 A2080 A2084 scie scopus 000361501800022 2-s2.0-84940068513 Electrochemistry Materials Science, Coatings & Films Electrochemistry Materials Science Article LITHIUM LANTHANUM TITANATE IONIC-CONDUCTIVITY BATTERIES STATE MICROBATTERIES MOBILITY NASICON Solid Electrolyte Thin-Film Battery Li-ion Battery