Lee, Jin Ju Ha, Jong-Yoon Choi, Won-Kook Cho, Yong Soo Choi, Ji-Won 2024-01-20T07:31:39Z 2024-01-20T07:31:39Z 2021-09-04 2015-04 2156-8952 https://pubs.kist.re.kr/handle/201004/125632 Mn-doped SnO2 thin films were fabricated by a continuous composition spread (CCS) method on a glass substrate at room temperature to find optimized compositions. The fabricated materials were found to have a lower resistivity than pure SnO2 thin films because of oxygen vacancies generated by Mn doping. As Mn content was increased, resistivity was found to decrease for limited doping concentrations. The minimum thin film resistivity was 0.29 Omega-cm for a composition of 2.59 wt % Mn-doped SnO2. The SnO vibrational stretching frequency in FT-IR showed a blue shift, consistent with oxygen deficiency. Mn-doped SnO2/Ag/Mn-doped SnO2 multilayer structures were fabricated using this optimized composition deposited by an on-axis radio frequency (RF) sputter. The multilayer transparent conducting oxide film had a resistivity of 7.35 x 10(-5) Omega-cm and an average transmittance above 86% in the 550 nm wavelength region. English AMER CHEMICAL SOC ROOM-TEMPERATURE ELECTRICAL-PROPERTIES OPTICAL-PROPERTIES ITO Doped SnO2 Transparent Conductive Multilayer Thin Films Explored by Continuous Composition Spread Article 10.1021/co500185d 1 ACS COMBINATORIAL SCIENCE, v.17, no.4, pp.247 - 252 ACS COMBINATORIAL SCIENCE 17 4 247 252 scie scopus 000353005400006 2-s2.0-84927947258 Chemistry, Applied Chemistry, Medicinal Chemistry, Multidisciplinary Chemistry Pharmacology & Pharmacy Article ROOM-TEMPERATURE ELECTRICAL-PROPERTIES OPTICAL-PROPERTIES ITO Mn-SnO2 multilayer continuous composition spread transparent conducting oxide