Kim, Yonghoon Lee, Hunsu Chang, Hongyoung 2024-01-20T07:32:46Z 2024-01-20T07:32:46Z 2021-09-05 2015-03 1567-1739 https://pubs.kist.re.kr/handle/201004/125690 Micro-arc ignition on the oily surface is investigated in a capacitively-coupled plasma (CCP) system. In this system, micro-arc generation is enhanced by increased level of plasma potential, which is induced by a DC-grounded coil between blocking capacitor and the powered electrode. The images of micro-arcs are captured with very short exposure time of 20 ms using intensified charge-coupled device triggered by a high speed comparator and the focused ground electrode is partially soiled with oil. The micro-arcs are observed only on the oily surface of the electrode. This observation provides that the oily surface of CCP is very weak for micro-arc ignition and micro-arc ignition is supposed to be enhanced by the oil evaporation and the thin oil layer, considering the RF Paschen breakdown of the oil vapor within the sheath and the dielectric breakdown of thin oil layer. (C) 2015 Elsevier B.V. All rights reserved. English ELSEVIER SCIENCE BV ARGON GLOW-DISCHARGES ELECTRICAL BREAKDOWN PLANAR SYSTEM RF INITIATION VACUUM INCLUSIONS Micro-arc ignition on the oily surface of capacitively-coupled plasma Article 10.1016/j.cap.2014.12.021 1 CURRENT APPLIED PHYSICS, v.15, no.3, pp.313 - 318 CURRENT APPLIED PHYSICS 15 3 313 318 scie scopus kci ART001980997 000349904900027 2-s2.0-84920746834 Materials Science, Multidisciplinary Physics, Applied Materials Science Physics Article ARGON GLOW-DISCHARGES ELECTRICAL BREAKDOWN PLANAR SYSTEM RF INITIATION VACUUM INCLUSIONS Micro arc Micro arcing Spark Anomalous discharge