Park, Joong Sun Cheng, Lei Zorba, Vassilia Mehta, Apurva Cabana, Jordi Chen, Guoying Doeff, Marca M. Richardson, Thomas J. Park, Jung Hoon Son, Ji-Won Hong, Wan-Shick 2024-01-20T07:34:31Z 2024-01-20T07:34:31Z 2021-09-05 2015-02-02 0040-6090 https://pubs.kist.re.kr/handle/201004/125778 We present a study of the fabrication of thin films from a Li7La3Zr2O12 ( LLZO) target using pulsed laser deposition. The effects of substrate temperatures and impurities on electrochemical properties of the films were investigated. The thin films of Li-La-Zr-O were deposited at room temperature and higher temperatures on a variety of substrates. Deposition above 600 degrees C resulted in a mixture of cubic and tetragonal phases of LLZO, as well as a La2Zr2O7 impurity, and resulted in aluminum enrichment at the surface when Al-containing substrates were used. Films deposited at 600 degrees C exhibited the highest room temperature conductivity, 1.61 x 10-6 S/cm. The chemical stability toward metallic lithium was also studied using X-ray photoelectron spectroscopy, which showed that the oxidation state of zirconium remained at +4 following physical contact with heated lithium metal. (C) 2014 Elsevier B.V. All rights reserved. English ELSEVIER SCIENCE SA SOLID-ELECTROLYTE ELECTROCHEMICAL PROPERTIES IONIC-CONDUCTIVITY LITHIUM GARNET LI7LA3ZR2O12 AL FABRICATION BATTERY LIPON Effects of crystallinity and impurities on the electrical conductivity of Li-La-Zr-O thin films Article 10.1016/j.tsf.2014.11.019 1 THIN SOLID FILMS, v.576, pp.55 - 60 THIN SOLID FILMS 576 55 60 scie scopus 000349373300009 2-s2.0-84922362897 Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Materials Science Physics Article SOLID-ELECTROLYTE ELECTROCHEMICAL PROPERTIES IONIC-CONDUCTIVITY LITHIUM GARNET LI7LA3ZR2O12 AL FABRICATION BATTERY LIPON Lithium Solid electrolyte Garnet Lithium lanthanate zirconate Pulsed laser deposition