Kwon, Do-Hyun Park, Jong-Keuk Lee, Wook-Seong Baik, Young-Joon 2024-01-20T07:34:52Z 2024-01-20T07:34:52Z 2021-09-05 2015-02 1738-8228 https://pubs.kist.re.kr/handle/201004/125797 The microstructure of carbon film, deposited using hot-filament chemical vapor deposition, was investigated in relation to deposition pressure and methane concentration as deposition variables. Methane concentration in hydrogen gas was varied from 0.5 to 5% in volume. Deposition pressures were 5, 15, 45 and 75 Torr. Filament temperature and deposition temperature were fixed at 2100 degrees C and 950 degrees C, respectively. With increasing methane concentration, the surface morphology changed its microstructure from microcrystalline diamond, to nanocrystalline diamond, to graphite. Raman spectroscopic analysis and X-ray diffraction analysis confirmed the bonding structures corresponding to each microstructure. At 5 Torr, the surface showed a fine grained morphology, different from the microstructures in the other pressure cases; however, the bonding nature also changed from diamond to graphite with increasing methane concentration. Korean KOREAN INST METALS MATERIALS DIAMOND GROWTH PRESSURE Microstructure of Carbon Film Deposited Using Hot-Filament Chemical Vapor Deposition Article 10.3365/KJMM.2015.53.2.104 1 KOREAN JOURNAL OF METALS AND MATERIALS, v.53, no.2, pp.104 - 109 KOREAN JOURNAL OF METALS AND MATERIALS 53 2 104 109 scie scopus kci ART001956795 000349430700004 2-s2.0-84924348443 Materials Science, Multidisciplinary Metallurgy & Metallurgical Engineering Materials Science Metallurgy & Metallurgical Engineering Article DIAMOND GROWTH PRESSURE carbon and graphite deposition microstructure SEM diamond