Jeon, Woojin Lee, Woongkyu Yoo, Yeon Woo An, Cheol Hyun Han, Jeong Hwan Kim, Seong Keun Hwang, Cheol Seong 2024-01-20T08:04:29Z 2024-01-20T08:04:29Z 2021-09-05 2014-12 2050-7526 https://pubs.kist.re.kr/handle/201004/126027 Rutile structured TiO2 films have received great attention as dielectric materials in capacitors of the next-generation dynamic random access memory (DRAM) due to their high dielectric constant (80-150). Ru or RuO2, which is one of the most promising electrode materials in DRAM capacitors, is indispensable to form the rutile structure. In this work, a series of the Ru-related layers with compositions ranging from Ru to RuO2 via RuOx (x: similar to 1.12) was used as a bottom electrode for the ALD growth of TiO2 films. It was found that the growth per cycle of TiO2 at the initial growth stage was drastically increased on RuOx (RuO2/Ru mixture) compared to Ru and RuO2. This is attributed to the drastic increase in the chemical activity of oxygen in the mixture film of RuO2/Ru. The catalytic decomposition of RuO2 with the help of Ru in the film played the crucial role for the increase in the active oxygen. Although RuO2 and Ru mostly retained their structures during the ALD of TiO2 or chemical etching using O-3 gas, the RuOx film, which was composed of 56% RuO2 and 44% Ru, drastically changed its phase composition during the ALD of TiO2 at 250 degrees C and changed almost to Ru. Other chemical effects depending on the chemical composition and phase structure were also examined in detail. English ROYAL SOC CHEMISTRY CHEMICAL-VAPOR-DEPOSITION THIN-FILMS EPITAXIAL-GROWTH RUTHENIUM SUBSTRATE OXIDE PRECURSORS Chemistry of active oxygen in RuOx and its influence on the atomic layer deposition of TiO2 films Article 10.1039/c4tc01381f 1 JOURNAL OF MATERIALS CHEMISTRY C, v.2, no.46, pp.9993 - 10001 JOURNAL OF MATERIALS CHEMISTRY C 2 46 9993 10001 scie scopus 000344998700026 2-s2.0-84908632166 Materials Science, Multidisciplinary Physics, Applied Materials Science Physics Article CHEMICAL-VAPOR-DEPOSITION THIN-FILMS EPITAXIAL-GROWTH RUTHENIUM SUBSTRATE OXIDE PRECURSORS