Song, Byung Ju Song, Woo Jin Han, Jun Hyun Kim, Ka Ram Yoon, Su Jong Kim, Tae Gyu Kim, Jin Kon Cho, Hyun Kim, Gyeung-Ho Hwang, Dae Youn Kim, Hye Sung 2024-01-20T08:30:27Z 2024-01-20T08:30:27Z 2021-09-02 2014-12 1533-4880 https://pubs.kist.re.kr/handle/201004/126064 The microstructure and characteristics of silicon-incorporated diamond-like carbon film, fabricated using a radio-frequency plasma-enhanced chemical vapor deposition process with hexamethyldisilane [(CH3)(3)Si center dot Si(CH3)(3):HMDS] gas as a silicon source, were investigated. Diamond-like carbon films with silicon compositions from 0 to 5 atomic percent were deposited onto ultra-fine grained AZ31 magnesium alloy substrate as buffer layers or multilayers. Si doping led not only to an increase in the bonding ratio (sp(3)/sp(2)), but improvements in hardness, critical adhesion, and corrosion resistance. Out of the investigated samples, the multi-deposited silicon diamond-like carbon thin film on magnesium substrate showed the best combination of adhesive, wear resistance, and corrosion resistance properties. English AMER SCIENTIFIC PUBLISHERS TRIBOLOGICAL PROPERTIES MECHANICAL-PROPERTIES SI-INCORPORATION PLASMA CVD CARBON COATINGS ADHESION DEPOSITION WEAR Microstructure and Properties of Silicon-Incorporated DLC Film Fabricated Using HMDS Gas and RF-PECVD Process Article 10.1166/jnn.2014.10101 1 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.14, no.12, pp.9124 - 9130 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 14 12 9124 9130 scie scopus 000344126900043 2-s2.0-84910627961 Chemistry, Multidisciplinary Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter Chemistry Science & Technology - Other Topics Materials Science Physics Article TRIBOLOGICAL PROPERTIES MECHANICAL-PROPERTIES SI-INCORPORATION PLASMA CVD CARBON COATINGS ADHESION DEPOSITION WEAR Hexamethyldisilane Radio-Frequency Plasma-Enhanced Chemical Vapor Deposition Multilayered Silicon-Doped Diamond-Like Carbon Magnesium Alloy Substrate