Lee, Junwoo Choi, Wook Yoo, Yong Kyoung Hwang, Kyo Seon Lee, Sang-Myung Kang, Sungchul Kim, Jinseok Lee, Jeong Hoon 2024-01-20T08:30:37Z 2024-01-20T08:30:37Z 2021-09-02 2014-12 1424-8220 https://pubs.kist.re.kr/handle/201004/126073 The ability to measure pressure and force is essential in biomedical applications such as minimally invasive surgery (MIS) and palpation for detecting cancer cysts. Here, we report a force sensor for measuring a shear and normal force by combining an arrayed piezoelectric sensors layer with a precut glass top plate connected by four stress concentrating legs. We designed and fabricated a thin film piezoelectric force sensor and proposed an enhanced sensing tool to be used for analyzing gentle touches without the external voltage source used in FET sensors. Both the linear sensor response from 3 kPa to 30 kPa and the exact signal responses from the moving direction illustrate the strong feasibility of the described thin film miniaturized piezoelectric force sensor. English MDPI PRESSURE SENSOR LARGE-AREA SKIN A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor Article 10.3390/s141222199 1 SENSORS, v.14, no.12, pp.22199 - 22207 SENSORS 14 12 22199 22207 scie scopus 000346794300003 2-s2.0-84912123255 Chemistry, Analytical Engineering, Electrical & Electronic Instruments & Instrumentation Chemistry Engineering Instruments & Instrumentation Article PRESSURE SENSOR LARGE-AREA SKIN force sensor tactile sensor piezoelectric thin film MEMS