Kim, Eunkyeom Han, Seung-Hee 2024-01-20T08:33:05Z 2024-01-20T08:33:05Z 2021-09-02 2014-11 1533-4880 https://pubs.kist.re.kr/handle/201004/126197 The effect of pulsed DC sputtering on the crystalline growth of Ge thin film was investigated. Ge thin films were deposited on the glass substrates using ICP-assisted pulsed DC sputtering. The Ge target was sputtered using asymmetric bipolar pulsed DC sputtering system with and without assistance of ICP source. The pulse frequency of 200 Hz and the pulse on time of 500 tsec (duty cycle = 10%) were kept during sputtering process. Crystal structures were studied from X-ray diffraction. The X-ray diffraction patterns clearly showed crystalline film structures. The Ge thin films with randomly oriented crystalline were obtained using pulsed DC sputtering without ICP, whereas they had well aligned (220) orientation crystalline using ICP source. Moreover, the combination of ICP assistance and pulsed DC sputtering enhanced the growth of crystalline Ge thin films without hydrogen and metal by in situ deposition. The structure and lattice of the films were studied from TEM images. The cross-sectional TEM images revealed the deposited Ge films with columnar structure. English AMER SCIENTIFIC PUBLISHERS THIN-FILMS Enhancement of the Crystalline Ge Film Growth by Inductively Coupled Plasma-Assisted Pulsed DC Sputtering Article 10.1166/jnn.2014.9997 1 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.14, no.11, pp.8567 - 8571 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 14 11 8567 8571 scie scopus 000344126500080 2-s2.0-84908439667 Chemistry, Multidisciplinary Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter Chemistry Science & Technology - Other Topics Materials Science Physics Article THIN-FILMS Crystalline Growth Pulsed DC Sputtering ICP Assistance