Lee, Hyunjoo Jenny Park, Kwan Kyu Oralkan, Omer Kupnik, Mario Khuri-Yakub, Butrus T. 2024-01-20T09:00:15Z 2024-01-20T09:00:15Z 2021-09-02 2014-10 0278-0046 https://pubs.kist.re.kr/handle/201004/126299 Vapor detection using highly sensitive miniaturized resonant sensors is of great interest for many applications, including consumer, industrial, and environmental applications. An operational-amplifier-based multichannel oscillator that interfaces with a 50-MHz capacitive micromachined ultrasonic transducer array is presented for chemical sensing applications. The circuit was implemented in a 0.18-mu m CMOS technology to reduce power consumption, number of wires, and active area per channel. The presented integrated circuit also addresses the potential-frequency-locking problem between channels by allowing the open-loop gain to be adjustable off-chip. The feasibility of the developed oscillator for the chemical sensing application is demonstrated. Two channels that were operated simultaneously achieved excellent volume sensitivities of 8.5 x 10(-4)%/Hz and 3.9 x 10(-4)%/Hz, respectively, to relative humidity in N-2. English IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC MESOPOROUS SILICA QUALITY FACTOR PHASE NOISE CO2 DESIGN ARRAY A Multichannel Oscillator for a Resonant Chemical Sensor System Article 10.1109/TIE.2014.2300031 1 IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, v.61, no.10, pp.5632 - 5640 IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS 61 10 5632 5640 scie scopus 000336208200051 2-s2.0-84900525295 Automation & Control Systems Engineering, Electrical & Electronic Instruments & Instrumentation Automation & Control Systems Engineering Instruments & Instrumentation Article MESOPOROUS SILICA QUALITY FACTOR PHASE NOISE CO2 DESIGN ARRAY Capacitive micromachined ultrasonic transducer (CMUT) chemical sensor humidity detection multichannel oscillators