Lee, Hyunjoo J. Kim, Yanghee Yoon, Eui-Sung Cho, Il-Joo 2024-01-20T09:04:49Z 2024-01-20T09:04:49Z 2021-09-05 2014-08 1057-7157 https://pubs.kist.re.kr/handle/201004/126535 We present close-packed microlens arrays (MLAs) with high numerical aperture (NA) over a large range of dimensions based on glass blowing process and replication method. Polydimethylsiloxane (PDMS) MLAs with diameters from 50 mu m to 1 mm and a high NA of 0.37 (maximum achievable NA for a PDMS plano-convex lens) are demonstrated, which are difficult to achieve with the conventional methods for large microlenses. In addition, MLAs with various fill-factors up to 96.1% and different base shapes are demonstrated. By adjusting the cavity depth and the chamber pressure, the ratio of sag height and diameter can be further adjusted. [2013-0359] English IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC FABRICATION Versatile Size and Shape Microlens Arrays With High Numerical Apertures Article 10.1109/JMEMS.2014.2305993 1 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.23, no.4, pp.771 - 773 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 23 4 771 773 scie scopus 000341573300004 2-s2.0-84905581655 Engineering, Electrical & Electronic Nanoscience & Nanotechnology Instruments & Instrumentation Physics, Applied Engineering Science & Technology - Other Topics Instruments & Instrumentation Physics Article FABRICATION Glass reflow high numerical aperture microlens arrays replication method