Kim, Sang Hoon Jeong, Young Eun Ha, Heonphil Byun, Ji Young Kim, Young Dok 2024-01-20T10:02:07Z 2024-01-20T10:02:07Z 2021-09-05 2014-04-01 0169-4332 https://pubs.kist.re.kr/handle/201004/126895 Ultra-small (< 2 nm) nanoparticles of platinum and gold were produced by arc plasma deposition (APD) in a systematic way and the deposition behavior was studied. Nanoparticles were deposited on two dimensional amorphous carbon and amorphous titania thin films and characterized by transmission electron microscopy (TEM). Deposition behavior of nanoparticles by APD was studied with discharge voltage (V), discharge condenser capacitance (C), and the number of plasma pulse shots (n) as controllable parameters. The average size of intrinsic nanoparticles generated by APD process was as small as 0.9 nm and deposited nanoparticles began to have crystal structures from the particle size of about 2 nm. V was the most sensitive parameter to control the size and coverage of generated nanoparticles compared to C and n. Size of APD deposited nanoparticles was also influenced by the nature of evaporating materials and substrates. (C) 2014 Elsevier B.V. All rights reserved. English ELSEVIER VACUUM MULTILAYERS EROSION METALS Ultra-small platinum and gold nanoparticles by arc plasma deposition Article 10.1016/j.apsusc.2014.01.072 1 APPLIED SURFACE SCIENCE, v.297, pp.52 - 58 APPLIED SURFACE SCIENCE 297 52 58 scie scopus 000331717200008 2-s2.0-84894609116 Chemistry, Physical Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Chemistry Materials Science Physics Article VACUUM MULTILAYERS EROSION METALS Nanoparticles Interfaces Pt Au Arc plasma deposition