Lee, Byeungleul Jeong, Jinwoo Kim, Jinseok Kim, Bonghwan Chun, Kukjin 2024-01-20T10:30:20Z 2024-01-20T10:30:20Z 2021-09-05 2014-03 1751-8741 https://pubs.kist.re.kr/handle/201004/127052 The authors developed a cantilever-arrayed blood pressure sensor array fabricated by (111) silicon bulk-micromachining for the non-invasive and continuous measurement of blood pressure. The blood pressure sensor measures the blood pressure based on the change in the resistance of the piezoresistor on a 5-m-thick-arrayed perforated membrane and 20-m-thick metal pads. The length and the width of the unit membrane are 210 and 310 m, respectively. The width of the insensible zone between the adjacent units is only 10 m. The resistance change over contact force was measured to verify the performance. The good linearity of the result confirmed that the polydimethylsiloxane package transfers the forces appropriately. The measured sensitivity was about 4.5%/N. The maximum measurement range and the resolution of the fabricated blood pressure sensor were greater than 900 mmHg ( = 120 kPa) and less than 1 mmHg ( = 133.3 Pa), respectively. English INST ENGINEERING TECHNOLOGY-IET VARIABILITY FABRICATION Cantilever arrayed blood pressure sensor for arterial applanation tonometry Article 10.1049/iet-nbt.2013.0046 1 IET NANOBIOTECHNOLOGY, v.8, no.1, pp.37 - 43 IET NANOBIOTECHNOLOGY 8 1 37 43 scie scopus 000333760600007 2-s2.0-84897481864 Biochemical Research Methods Nanoscience & Nanotechnology Biochemistry & Molecular Biology Science & Technology - Other Topics Article VARIABILITY FABRICATION cantilevers blood pressure measurement pressure sensors blood vessels silicon elemental semiconductors micromachining piezoresistive devices resistors biomembranes sensitivity polymers biomedical equipment arterial applanation tonometry cantilever-arrayed blood pressure sensor array (111) silicon bulk-micromachining noninvasive blood pressure measurement continuous blood pressure measurement piezoresistor thick-arrayed perforated membrane thick metal pads resistance contact force polydimethylsiloxane package sensitivity size 5 mum to 310 mum Si