Li, Xiaowei Ke, Peiling Lee, Kwang-Ryeol Wang, Aiying 2024-01-20T10:31:29Z 2024-01-20T10:31:29Z 2021-09-05 2014-02-03 0040-6090 https://pubs.kist.re.kr/handle/201004/127108 The influence of incident angles of energetic carbon atoms (0-60 degrees) on the structure and properties of diamondlike carbon (DLC) films was investigated by the molecular dynamics simulation using a Tersoff interatomic potential. The present simulation revealed that as the incident angles increased from 0 to 60 degrees, the surface roughness of DLC films increased and the more porous structure was generated. Along the growth direction of DLC films, the whole system could be divided into four regions including substrate region, transition region, stable region and surface region except the case at the incident angle of 60 degrees. When the incident angle was 45 degrees, the residual stress was significantly reduced by 12% with little deterioration of mechanical behavior. The further structure analysis using both the bond angles and bond length distributions indicated that the compressive stress reduction mainly resulted from the relaxation of highly distorted C-C bond length. (C) 2013 Elsevier B.V. All rights reserved. English ELSEVIER SCIENCE SA TETRAHEDRAL AMORPHOUS-CARBON TRIBOLOGICAL PROPERTIES DLC COATINGS GROWTH DEPOSITION SUBSTRATE RADICALS Molecular dynamics simulation for the influence of incident angles of energetic carbon atoms on the structure and properties of diamond-like carbon films Article 10.1016/j.tsf.2013.12.012 1 THIN SOLID FILMS, v.552, pp.136 - 140 THIN SOLID FILMS 552 136 140 scie scopus 000329987300021 2-s2.0-84892785120 Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Materials Science Physics Article TETRAHEDRAL AMORPHOUS-CARBON TRIBOLOGICAL PROPERTIES DLC COATINGS GROWTH DEPOSITION SUBSTRATE RADICALS Diamond-like carbon Residual stress Incident angles Molecular dynamics simulation