문희규 한수덕 강민규 정우석 장호원 유광수 박형호 강종윤 2024-01-20T10:31:53Z 2024-01-20T10:31:53Z 2021-09-06 2014-02 1225-5475 https://pubs.kist.re.kr/handle/201004/127129 We present gas sensing performance based on 2X2 sensor array with four different elements (TiO2, SnO2, WO3 and In2O3 thin films) fabricated by rf sputter. Each thin film was deposited onto the selected SiO2/Si substrate with Pt interdigitated electrodes (IDEs) of 5 ㎛ spacing which were fabricated on a SiO2/Si substrate using photolithography and dry etching. For 5 ppm NO2 and 50 ppm CO, each thin film sensor has a different response to offers the distinguishable response pattern for different gas molecules. Compared with the conventional micro-fabrication technology, 2X2 sensor array with such remarkable response pattern will be open a new foundation for monolithic integration of high-performance chemoresistive sensors with simplicity in fabrication, low cost, high reliablity, and multifunctional smart sensors for environmental monitoring. English 한국센서학회 Chemiresistive Sensor Array Based on Semiconducting Metal Oxides for Environmental Monitoring Article 10.5369/JSST.2014.23.1.15 2 센서학회지, v.23, no.1, pp.15 - 18 센서학회지 23 1 15 18 kci ART001847361 Gas sensors Oxide semiconductors TiO2 SnO2 WO3 In2O3 Chemiresistive thin film sensor array