Seo, Jung-Hun Park, Jung Ho Kim, Seong-Il Park, Bang Ju Ma, Zhenqiang Choi, Jinnil Ju, Byeong-Kwon 2024-01-20T10:32:51Z 2024-01-20T10:32:51Z 2021-09-04 2014-02 1533-4880 https://pubs.kist.re.kr/handle/201004/127181 A systematic review, covering fabrication of nanoscale patterns by laser interference lithography (LIL) and their applications for optical devices is provided. LIL is a patterning method. It is a simple, quick process over a large area without using a mask. LIL is a powerful technique for the definition of large-area, nanometer-scale, periodically patterned structures. Patterns are recorded in a light-sensitive medium that responds nonlinearly to the intensity distribution associated with the interference of two or more coherent beams of light. The photoresist patterns produced with LIL are the platform for further fabrication of nanostructures and growth of functional materials used as the building blocks for devices. Demonstration of optical and photonic devices by LIL is reviewed such as directed nanophotonics and surface plasmon resonance (SPR) or large area membrane reflectors and anti-reflectors. Perspective on future directions for LIL and emerging applications in other fields are presented. English AMER SCIENTIFIC PUBLISHERS PLASMONIC COLOR FILTERS NANOSPHERE LITHOGRAPHY BROAD-BAND INTERFEROMETRIC LITHOGRAPHY NANOIMPRINT LITHOGRAPHY BEAM LITHOGRAPHY PATTERNED MEDIA FABRICATION NANOFABRICATION NANOSTRUCTURES Nanopatterning by Laser Interference Lithography: Applications to Optical Devices Article 10.1166/jnn.2014.9199 1 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.14, no.2, pp.1521 - 1532 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 14 2 1521 1532 scie scopus 000331608900030 2-s2.0-84894118063 Chemistry, Multidisciplinary Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter Chemistry Science & Technology - Other Topics Materials Science Physics Review PLASMONIC COLOR FILTERS NANOSPHERE LITHOGRAPHY BROAD-BAND INTERFEROMETRIC LITHOGRAPHY NANOIMPRINT LITHOGRAPHY BEAM LITHOGRAPHY PATTERNED MEDIA FABRICATION NANOFABRICATION NANOSTRUCTURES Laser Interference Lithography Optical Devices Reflectors Anti-Reflectors Color Filters