Chung, Youngmin Park, Ho-young Oh, Si-hyoung Yoon, Dong Young Jin, Sang-wan Jang, Dong-yoon Ko, Jang Myoun Cho, Won Il Lee, Seong-Rae 2024-01-20T11:02:10Z 2024-01-20T11:02:10Z 2021-09-05 2013-12 1385-3449 https://pubs.kist.re.kr/handle/201004/127387 A LiNi0.7Co0.15Mn0.15O2 thin film cathode has been successfully prepared by hybrid direct current - radio frequency magnetron sputtering onto glass substrate from the LiNi0.7Co0.15Mn0.15O2 target and post-annealed by the rapid thermal annealing process. Its structure and morphology were characterized by X-ray diffraction, and scanning electron microscopy while its chemical compositions were confirmed with the inductively coupled plasma atomic absorption spectrophotometer, Raman spectroscopy, Auger electron spectroscopy, and glow discharge spectrometer. Its electrochemical properties were measured by galvanostatic charge - discharge test and cyclic voltammetry. First discharge capacity of 73 mu Ah cm(-2) mu m(-1) was obtained from a half cell with the LiNi0.7Co0.15Mn0.15O2 thin film cathode and lithium metal anode in the potential range of 4.3 similar to 2.5 V at 30 mu A and its coulombic efficiency was more than 99 %. English SPRINGER CHEMICAL-VAPOR-DEPOSITION LITHIUM-ION BATTERIES RECHARGEABLE MICROBATTERIES CATHODES LICOO2 PERFORMANCE ELECTRODES Structural and electrochemical properties of LiNi0.7Co0.15Mn0.15O2 thin film prepared by high frequency hybrid direct current and radio frequency magnetron sputtering Article 10.1007/s10832-013-9845-5 1 JOURNAL OF ELECTROCERAMICS, v.31, no.3-4, pp.316 - 323 JOURNAL OF ELECTROCERAMICS 31 3-4 316 323 scie scopus 000330216000007 2-s2.0-84890431036 Materials Science, Ceramics Materials Science Article CHEMICAL-VAPOR-DEPOSITION LITHIUM-ION BATTERIES RECHARGEABLE MICROBATTERIES CATHODES LICOO2 PERFORMANCE ELECTRODES LiNi0.7Co0.15Mn0.15O2 thin film Cathode Thin film battery Hybrid direct current and radio frequency magnetron sputtering Glow discharge spectrometer