Lee, Dongin Seo, Sung-Bo Kim, Dong-Young Kim, Hwa-Min Cho, Chanseob Lee, Jonghyun Lim, Sooyeon Kim, Jinseok Lee, Byeungleul Kim, Bonghwan 2024-01-20T11:02:47Z 2024-01-20T11:02:47Z 2021-09-05 2013-11-29 0040-6090 https://pubs.kist.re.kr/handle/201004/127419 We produced a superhydrophobic surface by reactive ion etching and polytetrafluoroethylene coating of a silicon substrate. SF6/O-2 and a metal mesh were used for the etching, which produced pyramidal nanostructures on the substrate. The sputtering of the polytetrafluoroethylene thin film over the nanotextured substrate created a superhydrophobic surface with a water contact angle greater than 150 degrees, which was maintained for 7 weeks. The fluorinated polymer also exhibited hydrophobicity properties. (C) 2013 Elsevier B.V. All rights reserved. English ELSEVIER SCIENCE SA DESIGN FABRICATION Nanotextured and polytetrafluoroethylene-coated superhydrophobic surface Article 10.1016/j.tsf.2013.04.059 1 THIN SOLID FILMS, v.547, pp.111 - 115 THIN SOLID FILMS 547 111 115 scie scopus 000326036100024 2-s2.0-84886794548 Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Materials Science Physics Article; Proceedings Paper DESIGN FABRICATION Superhydrophobicity Nanosized structure Metal mesh Polytetrafluoroethylene Contact angle