Lee, HunSu Kim, EunAe Lee, YunSeong Chang, HongYoung 2024-01-20T11:02:49Z 2024-01-20T11:02:49Z 2021-09-04 2013-11-29 0040-6090 https://pubs.kist.re.kr/handle/201004/127421 In capacitively coupled plasma, the driving frequency is changed to modify the ion bombardment energy and electron density. The multi-hole electrode capacitively coupled plasma is discharged with various driving frequencies of 13.56 MHz, 27.12 MHz, and 40.68 MHz, in order to elucidate the frequency effects of the discharge. The change of the driving frequency modifies the plasma parameters and the length of the sheath. As a result, the optimum diameter of the holes on the multi-hole electrode for efficient capacitively coupled plasma discharge changes. Crown Copyright (C) 2012 Published by Elsevier B.V. All rights reserved. English ELSEVIER SCIENCE SA POWER DISSIPATION SINGLE FILM The effect of the driving frequency on the optimum hole diameter for efficient multi-hole electrode RF capacitively coupled plasma Article 10.1016/j.tsf.2012.11.045 1 THIN SOLID FILMS, v.547, pp.289 - 292 THIN SOLID FILMS 547 289 292 scie scopus 000326036100060 2-s2.0-84886795361 Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Materials Science Physics Article; Proceedings Paper POWER DISSIPATION SINGLE FILM Multi-hole electrode Frequency Electron density Capacitively coupled plasma