Park, Jong Hyuk Nagpal, Prashant McPeak, Kevin M. Lindquist, Nathan C. Oh, Sang-Hyun Norris, David J. 2024-01-20T11:30:23Z 2024-01-20T11:30:23Z 2021-09-05 2013-10-09 1944-8244 https://pubs.kist.re.kr/handle/201004/127549 The template-stripping method can yield smooth patterned films without surface contamination. However, the process is typically limited to coinage metals such as silver and gold because other materials cannot be readily stripped from silicon templates due to strong adhesion. Herein, we report a more general template-stripping method that is applicable to a larger variety of materials, including refractory metals, semiconductors, and oxides. To address the adhesion issue, we introduce a thin gold layer between the template and the deposited materials. After peeling off the combined film from the template, the gold layer can be selectively removed via wet etching to reveal a smooth patterned structure of the desired material. Further, we demonstrate template-stripped multilayer structures that have potential applications for photovoltaics and solar absorbers. An entire patterned device, which can include a transparent conductor, semiconductor absorber, and back contact, can be fabricated. Since our approach can also produce many copies of the patterned structure with high fidelity by reusing the template, a low-cost and high-throughput process in micro- and nanofabrication is provided that is useful for electronics, plasmonics, and nanophotonics. English American Chemical Society BLOCK-COPOLYMER LITHOGRAPHY ELECTRON-BEAM LITHOGRAPHY PLASMONICS FILMS MICROSTRUCTURES METAMATERIALS CENTIMETER MICROSCOPY MONOLAYERS RESOLUTION Fabrication of Smooth Patterned Structures of Refractory Metals, Semiconductors, and Oxides via Template Stripping Article 10.1021/am402756d 1 ACS Applied Materials & Interfaces, v.5, no.19, pp.9701 - 9708 ACS Applied Materials & Interfaces 5 19 9701 9708 scie scopus 000326356600060 2-s2.0-84885454138 Nanoscience & Nanotechnology Materials Science, Multidisciplinary Science & Technology - Other Topics Materials Science Article BLOCK-COPOLYMER LITHOGRAPHY ELECTRON-BEAM LITHOGRAPHY PLASMONICS FILMS MICROSTRUCTURES METAMATERIALS CENTIMETER MICROSCOPY MONOLAYERS RESOLUTION template stripping refractory metals oxides photovoltaics thermophotovoltaics