Lee, Dong Gun Han, Jun Hyun Lee, Junwoo Choi, Wook Yoo, Yong Kyung Kim, Jinseok Hwang, Kyo Seon Kim, Tae Song Chun, Dong Won Kim, Yu-Chan Lee, Kyu Hyoung Lee, Jeong Hoon 2024-01-20T11:31:50Z 2024-01-20T11:31:50Z 2021-09-04 2013-10 0021-4922 https://pubs.kist.re.kr/handle/201004/127625 A micro-fabricated bridge sensor for determining minute magnetic field variation is proposed. A micro-bridge with 100 x 400 mu m(2) dimensions (width x length) comprises a multi-layered structure of Tb0.3Dy0.7Fe1.9/PbZr0.52Ti0.48O3 on a SiNx supporting layer. We observed the limit of detection under small DC magnetic field as 1 x 10(-11) T which was converted electrically to 77 mu V with a 5 mu V noise floor via elastic coupling between magnetostrictive and piezoelectric thin film. The magnetoelectric (ME) voltage was linearly proportional to small magnetic field variance, and the experimental ME coefficient was measured as 9.9 V/(cm.Oe). (C) 2013 The Japan Society of Applied Physics English IOP PUBLISHING LTD COMPOSITES Tb0.3Dy0.7Fe1.9/PbZr0.52Ti0.48O3 Micro-Bridge on SiNx Thin Film for Low Frequency Magnetic Sensing Applications Article 10.7567/JJAP.52.10MC10 1 JAPANESE JOURNAL OF APPLIED PHYSICS, v.52, no.10 JAPANESE JOURNAL OF APPLIED PHYSICS 52 10 scie scopus 000325946500050 2-s2.0-84887030678 Physics, Applied Physics Article COMPOSITES