Lee, J. J. Kim, J. S. Yoon, S. J. Cho, Y. S. Choi, J. W. 2024-01-20T12:31:45Z 2024-01-20T12:31:45Z 2021-09-05 2013-05 1533-4880 https://pubs.kist.re.kr/handle/201004/128115 Indium zinc oxide (IZO) films were deposited on glass substrate at room temperature using off-axis RE sputtering-continuous composition spread (CCS) system. The full range composition of IZO films were controlled by the deposition rate and thickness profiles of In2O3 and ZnO target. The structural, electrical and optical properties of IZO thin films were measured as functions of position. IZO thin film had the lowest resistivity and highest carrier concentration at the position of 15 mm (5.02 x 10(-4) Omega cm, 3.9 x 10(20)/cm(3)). And IZO thin film had high transmittance in visible region at measured all positions. This study has investigated to explore the new composition of IZO films using CCS system. English AMER SCIENTIFIC PUBLISHERS Electrical and Optical Properties of Indium Zinc Oxide (IZO) Thin Films by Continuous Composition Spread Article 10.1166/jnn.2013.7274 1 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.13, no.5, pp.3317 - 3320 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 13 5 3317 3320 scie scopus 000319953300025 2-s2.0-84876925488 Chemistry, Multidisciplinary Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter Chemistry Science & Technology - Other Topics Materials Science Physics Article; Proceedings Paper Indium Zinc Oxide Continuous Composition Spread Transparent Conductive Oxide