Hwang, Sunyong Kwon, Hyunah Chhajed, Sameer Byon, Ji Won Baik, Jeong Min Im, Jiseong Oh, Sang Ho Jang, Ho Won Yoon, Seok Jin Kim, Jong Kyu 2024-01-20T13:04:14Z 2024-01-20T13:04:14Z 2021-09-01 2013-01 0003-2654 https://pubs.kist.re.kr/handle/201004/128482 We present high performance gas sensors based on an array of near single crystalline TiO2 nanohelices fabricated by rotating oblique angle deposition (OAD). The combination of large surface-to-volume ratio, extremely small size (<30 nm) comparable to the Debye length, a near single crystallinity of TiO2 nanohelices, together with the unique top-and-bottom electrode configuration hugely improves the H-2-sensing performance, including similar to 10 times higher response at 50 ppm, approximately a factor of 5 lower detection limit, and much faster response time than the conventional TiO2 thin film devices. Beyond such remarkable performance enhancement, the excellent compatibility of the OAD method compared with the conventional micro-fabrication technology opens a new avenue for monolithic integration of high-performance chemoresistive sensors to fabricate a simple, low cost, reliable, yet fully functional electronic nose and multi-functional smart chips for in situ environmental monitoring. English Royal Society of Chemistry GLANCING ANGLE DEPOSITION THIN-FILMS REFRACTIVE-INDEX OXIDE-NANOWIRE SENSORS NANOSTRUCTURES SENSITIVITY FABRICATION HYDROGEN DIOXIDE A near single crystalline TiO2 nanohelix array: enhanced gas sensing performance and its application as a monolithically integrated electronic nose Article 10.1039/c2an35932d 1 Analyst, v.138, no.2, pp.443 - 450 Analyst 138 2 443 450 scie scopus 000312074300009 2-s2.0-84870911615 Chemistry, Analytical Chemistry Article GLANCING ANGLE DEPOSITION THIN-FILMS REFRACTIVE-INDEX OXIDE-NANOWIRE SENSORS NANOSTRUCTURES SENSITIVITY FABRICATION HYDROGEN DIOXIDE