Park, Woo Young Park, Min Hyuk Lee, Jong Ho Yoon, Jung Ho Han, Jeong Hwan Choi, Jung-Hae Hwang, Cheol Seong 2024-01-20T13:30:49Z 2024-01-20T13:30:49Z 2021-09-04 2012-12-07 2045-2322 https://pubs.kist.re.kr/handle/201004/128556 The strain states of [111]-, [110]-, and [002]-oriented grains in poly-crystalline sputtered (Ba,Sr)TiO3 thin films on highly [111]-oriented Pt electrode/Si substrates were carefully examined by X-ray diffraction techniques. Remarkably, [002]-oriented grains respond more while [110]- and [111]-oriented grains do less than the theoretically estimated responses, which is understandable from the arrangement of the TiO6 octahedra with respect to the stress direction. Furthermore, such mechanical responses are completely independent of the degree of crystallization and film thickness. The transition growth temperature between the positive and negative strains was also different depending on the grain orientation. The unstrained lattice parameter for each type of grain was different suggesting that the oxygen vacancy concentration for each type of grain is different, too. The results reveal that polycrystalline (Ba,Sr)TiO3 thin films are not an aggregation of differently oriented grains which simply follow the mechanical behavior of single crystal with different orientations. English NATURE PUBLISHING GROUP STRONTIUM-TITANATE FILMS POLARIZATION ENHANCEMENT ELECTRICAL-PROPERTIES DIELECTRIC-PROPERTIES PHASE-DIAGRAMS FERROELECTRICITY CAPACITORS SRTIO3 SUPERLATTICES DEPOSITION Strain evolution of each type of grains in poly-crystalline (Ba,Sr)TiO3 thin films grown by sputtering Article 10.1038/srep00939 1 SCIENTIFIC REPORTS, v.2 SCIENTIFIC REPORTS 2 scie scopus 000311988400001 2-s2.0-84871747361 Multidisciplinary Sciences Science & Technology - Other Topics Article STRONTIUM-TITANATE FILMS POLARIZATION ENHANCEMENT ELECTRICAL-PROPERTIES DIELECTRIC-PROPERTIES PHASE-DIAGRAMS FERROELECTRICITY CAPACITORS SRTIO3 SUPERLATTICES DEPOSITION (Ba,Sr)TiO3 Strain sputtering