명희복 Teng Fei Zhang 박종극 김두인 김광호 신동우 2024-01-20T13:31:16Z 2024-01-20T13:31:16Z 2021-09-06 2012-12 1225-8024 https://pubs.kist.re.kr/handle/201004/128579 Cr-Ti-B-N coatings were synthesized by a hybrid coating system combining high power impulse magnetron sputtering (HIPIMS) and DC pulse magnetron sputtering from a TiB2 and a Cr target in argon-nitrogen environment,respectively. By changing the power applied on the Cr and TiB2 cathodes, the Cr-Ti-B-N coatings with various Ti/Cr ratio and B content were deposited. The phase structure, microstructure and chemical compositions of the Cr-Ti-B-N coatings were studied by X-ray diffraction (XRD), transmission scanning electron microscopy (TEM), and X-ray photoelectron spectroscopy (XPS). With increase of Cr element in the coatings, the nanocomposite microstructure consisting of nano-sized (Cr, Ti) N crystallites and amorphous BN phase were obtained in the coatings. The microhardness of the Cr-Ti-B-N coatings exhibited a peak value of ~41 GPa for the CrTi0.1B0.4N1.3, and then decreased with further increase of Cr content in the coatings,and all the coatings exhibited low friction coefficient. The oxidation and corrosion behavior of th English 한국표면공학회 Syntheses and Properties of Quaternary Cr-Ti-B-N Coatings by a High Power Impulse Magnetron Sputtering Technique Article 10.5695/JKISE.2011.45.6.232 2 한국표면공학회지, v.45, no.6, pp.232 - 241 한국표면공학회지 45 6 232 241 kci ART001731773 HIPIMS Cr-Ti-B-N coatings Nanocomposite Friction Anti-corrosion