Hwang, Dong Gun Chae, Youn Mee Hwang, Kyo Seon Kang, Ji Yoon Lee, Soo Hyun 2024-01-20T13:33:26Z 2024-01-20T13:33:26Z 2021-09-05 2012-11 1385-3449 https://pubs.kist.re.kr/handle/201004/128685 Our research, based on executing theoretical modeling depending on the dimensions of PZT (lead zirconate titanate) thin film, was applied to two different bridge-shaped resonators. The critical point of having two different types of resonators is that it is a way of releasing the bridge. The first type of bridge-shaped resonator is released through use of an isotropic etching method using XeF2 gas, while the second type of bridge-shaped resonator is released by a wet etching method that uses a KOH solution. The bridge-shaped resonators are anticipated to have accurate mass detecting sensors based on high mass sensitivity compared to the other shapes, such as diaphragms and cantilevers. The feasibility of a bridge-shaped PZT resonator as a mass sensor has been researched through studying the resonant frequency shift of a bridge-shaped resonator. The actual resonant properties of bridge-shaped resonators were determined by measuring resonant frequency and Q-factor measurements using an LDV (Laser Doppler Vibrometer). The resonant frequency appears in the ranges of 378.4-419.8, 144.0-180.3, and 107.8-123.4 kHz for dimensions of 50 mu m x 250 mu m, 100 mu m x 500 mu m, and 150 mu m x 750 mu m, respectively. Finally, four different thicknesses of Titanium (Ti) were loaded on the bridge-shaped resonator to confirm its variation and mass sensitivity. Significantly, mass sensitivities with dimensions of 50 mu m x 250 mu m, 100 mu m x 500 mu m, and 150 mu m x 750 mu m were 2.02 Hz/pg, 330.42 Hz/ng, and 43.67 Hz/ng, respectively. Thus, the bridge-shaped resonator with dimensions of 50 mu m x 250 mu m was able to detect the picogram-level of a mass. English SPRINGER CANTILEVER ARRAY Fabrication and characterization of PZT (lead zirconate titanate) bridge-shaped resonator for mass sensing application Article 10.1007/s10832-012-9767-7 1 JOURNAL OF ELECTROCERAMICS, v.29, no.3, pp.225 - 234 JOURNAL OF ELECTROCERAMICS 29 3 225 234 scie scopus 000310386700010 2-s2.0-84868548098 Materials Science, Ceramics Materials Science Article CANTILEVER ARRAY PZT Thin film Bridge-shaped resonator Mass sensor Resonant frequency