Lee, He Seung Choi, Seung-Sock Baek, Kyung-Youl Lee, Eung Chan Hong, Soon Man Lee, Jong-Chan Hwang, Seung Sang 2024-01-20T13:34:32Z 2024-01-20T13:34:32Z 2021-09-04 2012-11 1598-5032 https://pubs.kist.re.kr/handle/201004/128743 A series of high molecular weight polymethylsilsesquioxanes (PMSQs) were synthesized through polymerization of an isolated hydroxyl-substituted cyclic siloxane stereoisomer, cis-trans-cis 1,3,5,7 tetramethyl 1,3,5,7 tetrahydroxyl cyclosiloxane, for interlayer dielectric (ILD) application as low dielectric materials. The molecular weights of PMSQs were controlled by varying polycondensation time. Structural analyses of the obtained PMSQs were carried out by gel chromatography (GPC), FTIR, Si-29 NMR, static light scattering (SLS), solution X-ray scattering, and X-ray diffraction. The change in molecular shape of the PMSQs went from linear to branched in structure as molecular weight increased. Furthermore, thin film properties were investigated for application as interlayer dielectric materials. As structural branching increased, its properties showed isotropic tendencies, relatively high modulus (5.4 GPa), and low dielectric constant (2.74) with increase in the inter-molecular space. English POLYMER SOC KOREA CONSTANT POLY(METHYLSILSESQUIOXANE)S SILSESQUIOXANE SIMULATION Structural analysis of high molecular weight PMSQs and their related properties for interlayer dielectric (ILD) application Article 10.1007/s13233-012-0168-1 1 MACROMOLECULAR RESEARCH, v.20, no.11, pp.1131 - 1136 MACROMOLECULAR RESEARCH 20 11 1131 1136 scie scopus kci ART001712060 000310538900005 2-s2.0-84871034880 Polymer Science Polymer Science Article CONSTANT POLY(METHYLSILSESQUIOXANE)S SILSESQUIOXANE SIMULATION polymethylsilsesquioxane high molecular weight polymer shape dielectric