Joe, Minwoong Moon, Myoung-Woon Lee, Kwang-Ryeol 2024-01-20T13:34:49Z 2024-01-20T13:34:49Z 2021-09-05 2012-10-30 0040-6090 https://pubs.kist.re.kr/handle/201004/128755 Diamond-like carbon (DLC) films are composed of carbon bonds with different hybridizations, including sp(2), sp(3) and even sp(1). Understanding the atomic bonding structure is essential to understanding the properties and optimizing the process parameters of the films. Because of the limited analytical tools for characterizing the atomic bonding structure in amorphous materials, computational research at the atomistic scale could provide significant insight into the structure-property relationships in diamond-like carbon films and has been applied to understanding the various phenomena occurring during DLC film growth. The contributions of the atomistic simulations and electronic structure calculations pertain mainly to three important issues: (i) the sp(3) bond formation and stress generation mechanisms, (ii) the stress reduction mechanism by metal incorporation, and (iii) the impact angle-dependent surface smoothening/roughening mechanisms. (C) 2011 Elsevier B. V. All rights reserved. English ELSEVIER SCIENCE SA TETRAHEDRAL AMORPHOUS-CARBON ION-BEAM DEPOSITION MOLECULAR-DYNAMICS SIMULATION STRESS-INDUCED FORMATION A-C-H THIN-FILMS MECHANICAL-PROPERTIES SUBPLANTATION MODEL COMPRESSIVE-STRESS HYDROCARBONS Atomistic simulations of diamond-like carbon growth Article 10.1016/j.tsf.2011.11.060 1 THIN SOLID FILMS, v.521, pp.239 - 244 THIN SOLID FILMS 521 239 244 scie scopus 000309905900055 2-s2.0-84867055487 Materials Science, Multidisciplinary Materials Science, Coatings & Films Physics, Applied Physics, Condensed Matter Materials Science Physics Article; Proceedings Paper TETRAHEDRAL AMORPHOUS-CARBON ION-BEAM DEPOSITION MOLECULAR-DYNAMICS SIMULATION STRESS-INDUCED FORMATION A-C-H THIN-FILMS MECHANICAL-PROPERTIES SUBPLANTATION MODEL COMPRESSIVE-STRESS HYDROCARBONS Molecular dynamics Diamond-like carbon Amorphous carbon Subplantation Thermal spike Surface roughening